Chemische Dampfablagerung : CVD-Grundlagen für die Mikroelektronik
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | German |
| Published: |
Berlin :
Akademie-Verlag,
1982
|
| Contents/pieces: | 1 records |
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | German |
| Published: |
Berlin :
Akademie-Verlag,
1982
|
| Contents/pieces: | 1 records |